JPS6268228U - - Google Patents
Info
- Publication number
- JPS6268228U JPS6268228U JP16102385U JP16102385U JPS6268228U JP S6268228 U JPS6268228 U JP S6268228U JP 16102385 U JP16102385 U JP 16102385U JP 16102385 U JP16102385 U JP 16102385U JP S6268228 U JPS6268228 U JP S6268228U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- hole
- sample stage
- held
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16102385U JPS6268228U (en]) | 1985-10-18 | 1985-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16102385U JPS6268228U (en]) | 1985-10-18 | 1985-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6268228U true JPS6268228U (en]) | 1987-04-28 |
Family
ID=31086956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16102385U Pending JPS6268228U (en]) | 1985-10-18 | 1985-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6268228U (en]) |
-
1985
- 1985-10-18 JP JP16102385U patent/JPS6268228U/ja active Pending